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DIMENSIONAL FUND ADVISORS LP
> ACLS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 941,079 | -86,528 | 172,524,370,000 | 35,594,728,000 | $183,326.13 |
| 03/31/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 1,027,607 | -357,985 | 136,929,642,000 | 136,819,684,000 | $133,250.98 |
| 12/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,385,592 | -18,171 | 109,958,000 | 24,942,000 | $79.36 |
| 09/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,403,763 | -83,155 | 85,016,000 | 3,475,000 | $60.56 |
| 06/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,486,918 | -70,428 | 81,541,000 | -36,088,000 | $54.84 |
| 03/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,557,346 | -18,158 | 117,629,000 | 162,000 | $75.53 |
| 12/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,575,504 | -33,605 | 117,467,000 | 41,791,000 | $74.56 |
| 09/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,609,109 | 6,176 | 75,676,000 | 10,885,000 | $47.03 |
| 06/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,602,933 | -116,429 | 64,791,000 | 14,723,000 | $40.42 |
| 12/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,719,362 | -65,526 | 50,068,000 | 10,800,000 | $29.12 |
| 09/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,784,888 | -157,443 | 39,268,000 | -14,823,000 | $22.00 |
| 06/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,942,331 | -182,357 | 54,091,000 | 15,189,000 | $27.85 |
| 03/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 2,124,688 | -226,170 | 38,902,000 | -17,742,000 | $18.31 |
| 12/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,350,858 | -39,041 | 56,644,000 | 15,801,000 | $24.10 |
| 09/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,389,899 | 402 | 40,843,000 | 4,881,000 | $17.09 |
| 06/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,389,497 | 7,427 | 35,962,000 | -11,965,000 | $15.05 |
| 03/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,382,070 | 96,135 | 47,927,000 | 7,237,000 | $20.12 |
| 12/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,285,935 | 208,263 | 40,690,000 | -136,000 | $17.80 |
| 09/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,077,672 | 122,068 | 40,826,000 | 2,105,000 | $19.65 |
| 06/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 1,955,604 | 105,108 | 38,721,000 | -6,801,000 | $19.80 |
| 03/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 1,850,496 | 20,891 | 45,522,000 | -6,990,000 | $24.60 |
| 12/31/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 1,829,605 | -5,946 | 52,512,000 | 2,311,000 | $28.70 |
| 09/30/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 1,835,551 | 25,567 | 50,201,000 | 12,281,000 | $27.35 |
| 06/30/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 1,809,984 | 43,975 | 37,920,000 | 4,720,000 | $20.95 |
| 03/31/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 1,766,009 | 163,016 | 33,200,000 | 9,877,000 | $18.80 |
| 12/31/2016 | AXCELIS TECHNOLOGIES INC | ACLS | 1,602,993 | 82,443 | 23,323,000 | 3,130,000 | $14.55 |
| 09/30/2016 | AXCELIS TECHNOLOGIES INC | ACLS | 1,520,550 | 1,520,550 | 20,193,000 | 20,193,000 | $13.28 |
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