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FMR LLC
> ACLS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 1,083,073 | 42,564 | 198,559,853,000 | 59,912,076,000 | $183,330.07 |
| 03/31/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 1,040,509 | 1,026,949 | 138,647,777,000 | 138,646,956,000 | $133,249.95 |
| 09/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 13,560 | -2,320 | 821,000 | -49,000 | $60.55 |
| 06/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 15,880 | 15,193 | 870,000 | 818,000 | $54.79 |
| 03/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 687 | -12 | 52,000 | -1,000 | $75.69 |
| 12/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 699 | 80 | 53,000 | 24,000 | $75.82 |
| 09/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 619 | -23 | 29,000 | 3,000 | $46.85 |
| 06/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 642 | 280 | 26,000 | 11,000 | $40.50 |
| 03/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 362 | 335 | 15,000 | 14,000 | $41.44 |
| 12/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 27 | -48 | 1,000 | -1,000 | $37.04 |
| 09/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 75 | 75 | 2,000 | 2,000 | $26.67 |
| 09/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 0 | -80 | 0 | -1,000 | |
| 06/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 80 | -133 | 1,000 | -3,000 | $12.50 |
| 03/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 213 | 23 | 4,000 | 1,000 | $18.78 |
| 12/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 190 | -46 | 3,000 | -2,000 | $15.79 |
| 09/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 236 | 236 | 5,000 | 5,000 | $21.19 |
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