| Date Filed | Type | Description |
| 02/13/2013 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 4.3% stake in ULTRATECH, INC. |
| 02/09/2012 |
SC 13G/A
| Form SC 13G/A - Statement of acquisition of beneficial ownership by individuals: [Amend] |
| 02/01/2011 |
SC 13G/A
| Form SC 13G/A - Statement of acquisition of beneficial ownership by individuals: [Amend] |
| 02/12/2010 |
SC 13G/A
| Form SC 13G - Statement of acquisition of beneficial ownership by individuals [amend] |
| 02/11/2009 |
SC 13G/A
| Form SC 13G/A -- Statement of acquisition of beneficial ownership by individuals [amend] |
| 02/13/2007 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 9.6% stake in ULTRATECH, INC. |
| 02/14/2006 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 9.9% stake in ULTRATECH, INC. |
| 02/10/2005 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 9.6% stake in ULTRATECH, INC. |
| 02/13/2004 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 7.8% stake in ULTRATECH, INC. |
| 02/14/2003 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 8.4% stake in ULTRATECH STEPPER, INC. |
| 02/14/2002 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 7.6% stake in Estimated average burden hours per response. . . 14.90 ULTRATECH STEPPER, INC. |
| 02/05/1999 |
SC 13G/A
| ZAFIROPOULO ARTHUR W reports a 8.3% stake in ULTRATECH STEPPER, INC. |
| 02/06/1998 |
SC 13G
| ZAFIROPOULO ARTHUR W reports a 8.4% stake in ULTRATECH STEPPER, INC. |
| 02/06/1997 |
SC 13G
| ZAFIROPOULO ARTHUR W reports a 9.8% stake in ULTRATECH STEPPER, INC. |